The optical properties of thin film alloys of ZnO, TiO2 and ZrO2 with Al2O3 synthesised using atomic layer deposition
Authors:
- Natalia Nosidlak,
- Janusz Jaglarz,
- Andrea Vallati,
- Piotr Dulian,
- Maria Jurzecka-Szymacha,
- Sylwia Gierałtowska,
- Aleksandra Seweryn,
- Łukasz Wachnicki,
- Bartłomiej S. Witkowski,
- Marek Godlewski
Abstract
In this work, the results of ellipsometric studies of thin films of broadband oxides (ZnO, TiO2 , ZrO2 ) and broadband oxides doped with Al2O3 (Al2O3–ZnO, Al2O3–TiO2 , Al2O3–ZrO2 ) are presented. All layers have been produced using the atomic layer deposition method. Ellipsometric studies were performed in the wavelength range of 193–1690 nm. Sellmeier and Cauchy models were used to describe the optical properties of the tested layers. Dispersion dependencies of refractive indices were determined for thin layers of broadband oxides on silicon substrates, and then for layers of Al2O3 admixture. The EDX investigations enabled estimation of the composition of the alloys. The Bruggeman effective medium approximation (EMA) model was used to determine the theoretical dependencies of the dispersion refractive indices of the studied alloys. The refractive index values determined using the Bruggeman EMA model are in good agreement with the values determined from the ellipsometric measurements. The doping of thin layers of ZnO, ZrO2 and TiO2 with Al2O3 enables the creation of anti-reflective layers and filters with a specific refractive index.
- Record ID
- CUT09eecd4635b74e8d83f07d1969e75d9c
- Publication categories
- ;
- Author
- Journal series
- Coatings, ISSN , e-ISSN 2079-6412, Quarterly
- Issue year
- 2023
- Vol
- 13
- No
- 11
- Pages
- [1-12]
- Article number
- 1872
- Other elements of collation
- rys.; tab.; wykr.; Bibliografia (na s.) - 11-12; Bibliografia (liczba pozycji) - 29; Oznaczenie streszczenia - Abstr.; Numeracja w czasopiśmie - Vol. 13, Iss. 11
- Keywords in English
- ALD deposition, thin dielectric films, optical properties, ellipsometry
- DOI
- DOI:10.3390/coatings13111872 Opening in a new tab
- URL
- https://www.mdpi.com/2079-6412/13/11/1872 Opening in a new tab
- Related project
- Opracowanie innowacyjnego, wielkoformatowego reaktora ALD z komorą o zmiennej geometrii wraz z opracowaniem nowych powłok, dla podłoża szklanego o dużych wymiarach. . Project leader at PK: , ,
- Language
- eng (en) English
- License
- Score (nominal)
- 100
- Score source
- journalList
- Score
- Uniform Resource Identifier
- https://cris.pk.edu.pl/info/article/CUT09eecd4635b74e8d83f07d1969e75d9c/
- URN
urn:pkr-prod:CUT09eecd4635b74e8d83f07d1969e75d9c
* presented citation count is obtained through Internet information analysis, and it is close to the number calculated by the Publish or PerishOpening in a new tab system.