Thermo-optical properties of high-refractive-index plasma-deposited hydrogenated amorphous silicon-rich nitride films on glass
Authors:
- Janusz Jaglarz,
- Maria Jurzecka-Szymacha,
- Stanisława Kluska,
- Katarzyna Tkacz-Śmiech
Abstract
Optical and thermo-optical studies of hydrogenated amorphous silicon-rich nitride films were carried out. The films were produced by plasma-assisted chemical vapor deposition on glass. It is shown that the films deposited under appropriately selected processing conditions contain little nitrogen, as confirmed by Fourier-transform infrared spectroscopy therefore they are referred to as silicon-rich nitrides, a-SRN:H. Spectroscopic ellipsometry, reflectance, and transmittance spectroscopy were used to determine the optical indexes of the films and their thicknesses. It results from the ellipsometric measurements performed within a 190-1700nm spectral wavelength range that a-SRN:H films exhibit a high refractive index of about 3.7. It is also shown that post-deposition annealing up to 300°C does not affect the optical parameters of the films. Additionally, they are transparent in the near-infrared region, which makes them a good candidate for applications in various optoelectronic systems.
- Record ID
- CUT81072d389d854b73a7e01b1f6e7341a1
- Publication categories
- ;
- Author
- Journal series
- Optical Materials Express, ISSN 2159-3930
- Issue year
- 2020
- Vol
- 10
- No
- 11
- Pages
- 2749-2756
- Other elements of collation
- tab.; wykr.; Bibliografia (na s.) - 2755-2756; Bibliografia (liczba pozycji) - 26; Oznaczenie streszczenia - Abstr.; Numeracja w czasopiśmie - Vol. 10, Iss. 11
- Keywords in English
- hydrogenated amorphous silicon nitride films, ellipsometry, optical properties
- DOI
- DOI:10.1364/OME.396150 Opening in a new tab
- URL
- https://www.osapublishing.org/ome/fulltext.cfm?uri=ome-10-11-2749&id=441008 Opening in a new tab
- Language
- eng (en) English
- License
- Score (nominal)
- 100
- Additional fields
- Indeksowana w: Web of Science
- Uniform Resource Identifier
- https://cris.pk.edu.pl/info/article/CUT81072d389d854b73a7e01b1f6e7341a1/
- URN
urn:pkr-prod:CUT81072d389d854b73a7e01b1f6e7341a1
* presented citation count is obtained through Internet information analysis, and it is close to the number calculated by the Publish or PerishOpening in a new tab system.