Double layer sol-gel derived antireflective coatings on silicon – design, optical and Auger Electron Spectroscopy characterization
Authors:
- M. Skolik,
- A. Domanowska,
- P. Karasiński,
- E. Gondek,
- A. Michalewicz
Abstract
Double layer, silica – titania, antireflective coatings were fabricated on silicon substrates using sol-gel method and dip coating technique. 2 × 2 transfer matrix formalism was applied to optimize these structures. Spectrophotometric measurements of reflectance were performed to determine reflective properties of fabricated structures. Their chemical homogeneity was examined by Auger Electron Spectroscopy (AES)method. It was demonstrated that weighted average reflectance from the structures can be reduced to 3.71% over spectral range 300–1100 nm.
- Record ID
- CUTd87dcfd4f01340e1800a71a8a87ea3b2
- Publication categories
- ;
- Author
- Journal series
- Materials Letters, ISSN 0167-577X, e-ISSN 1873-4979
- Issue year
- 2019
- Vol
- 251
- Pages
- 210-213
- Other elements of collation
- rys.; wykr.; Bibliografia (na s.) - 213; Bibliografia (liczba pozycji) - 9; Oznaczenie streszczenia - Abstr.; Numeracja w czasopiśmie - Vol. 251
- Keywords in English
- antireflective structure, Auger Electron Spectroscopy, silica, sol-gel, titania, transfer matrix method
- DOI
- DOI:10.1016/j.matlet.2019.05.071 Opening in a new tab
- URL
- https://www.sciencedirect.com/science/article/pii/S0167577X19307827 Opening in a new tab
- Language
- eng (en) English
- Score (nominal)
- 70
- Additional fields
- Indeksowana w: Scopus
- Uniform Resource Identifier
- https://cris.pk.edu.pl/info/article/CUTd87dcfd4f01340e1800a71a8a87ea3b2/
- URN
urn:pkr-prod:CUTd87dcfd4f01340e1800a71a8a87ea3b2
* presented citation count is obtained through Internet information analysis, and it is close to the number calculated by the Publish or PerishOpening in a new tab system.