Comparison of a-C:N:H layers grown at the anode and cathode in RF-PACVD processing
Authors:
- Katarzyna Tkacz-Śmiech,
- Katarzyna Dyndał,
- Jerzy Sanetra,
- Janusz Jaglarz
Abstract
Formation of amorphous hydrogenated carbon nitride layers, a-C:N:H, by radio frequency plasma - assisted chemical vapour deposition, RF-PACVD, 13.56 MHz, is studied. The repeatability of the process is examined in a series of experiments conducted at the same conditions. The layers deposited on silicon wafers placed at the cathode and the anode are compared. Thicknesses and optical parameters of the layers are measured using spectroscopic ellipsometry. Structural studies are performed with the use of scanning electron microscope SEM, atomic force microscope AFM, Fourier transform infrared FTIR and Raman spectroscopic techniques. The results confirm that high repeatability of processing has been achieved for each electrode. Significant differences are however observed between the layers deposited at different electrodes. The differences concern deposition rate, optical constants, depolarization coefficient and morphology of the layers. Differences in the morphology appear as some inclusions in a matrix of the anode layers, being confirmed by bidirectional reflectance distribution function BRDF, depolarization and Raman spectra measurements. The cathode layers are entirely amorphous.
- Record ID
- CUT5be0ca33ad0949369ffd124dcc62784d
- Publication categories
- ;
- Author
- Journal series
- Vacuum, ISSN 0042-207X
- Issue year
- 2017
- Vol
- 146
- Pages
- 15-21
- Other elements of collation
- il. (w tym kolor.); Bibliografia (na s.) - 20-21; Bibliografia (liczba pozycji) - 27; Oznaczenie streszczenia - Abstr.; Numeracja w czasopiśmie - Vol. 146
- Keywords in English
- carbon nitride layers, chemical vapour deposition, ellipsometry, structural, optical properties
- DOI
- DOI:10.1016/j.vacuum.2017.09.025 Opening in a new tab
- URL
- http://www.sciencedirect.com/science/article/pii/S0042207X17307157 Opening in a new tab
- Language
- eng (en) English
- Score (nominal)
- 25
- Additional fields
- Indeksowana w: Web of Science, Scopus
- Uniform Resource Identifier
- https://cris.pk.edu.pl/info/article/CUT5be0ca33ad0949369ffd124dcc62784d/
- URN
urn:pkr-prod:CUT5be0ca33ad0949369ffd124dcc62784d
* presented citation count is obtained through Internet information analysis, and it is close to the number calculated by the Publish or PerishOpening in a new tab system.